IMT 21-2023 Master Thesis: High Entropy Alloy-based MEMS Gas Sensor

  • Institute of Microstructure Technology (IMT)
  • Fixed-Term
  • Full-time

Your Tasks

Introduction: In this master's thesis project, you will be working on the development and characterization of a high entropy alloy (HEA)-based MEMS gas sensor. The objective of this research is to explore the potential of HEAs in gas sensing applications and to design an efficient and reliable gas sensor with improved performance characteristics. The focus will be on developing a MEMS-based gas sensor platform using HEAs and investigating its sensitivity, selectivity, and response to various gases.


Literature Review:

  • Conduct an extensive literature review to understand the principles, techniques, and recent advancements in gas sensing, MEMS devices, and high entropy alloys.
  • Identify the state-of-the-art gas sensing mechanisms, materials, fabrication techniques, and characterization methods used in the field.
  • Analyze the existing challenges and opportunities for utilizing high entropy alloys in MEMS gas sensor applications.

Sensor Design and Fabrication:

  • Design and optimize a MEMS gas sensor platform incorporating high entropy alloys as the sensing material.
  • Collaborate with your advisor and research team to finalize the sensor design, considering factors such as sensor size, geometry, and fabrication processes.
  • Utilize software tools for designing and simulating the sensor's performance characteristics.

Material Selection and Characterization:

  • Select suitable high entropy alloys based on their composition, properties, and compatibility with gas sensing applications.
  • Obtain or synthesize the chosen high entropy alloy compositions and characterize their structural, mechanical, and chemical properties.
  • Investigate the sensing properties of the high entropy alloy materials towards target gases using experimental techniques such as gas exposure tests and spectroscopy.

Sensor Testing and Performance Evaluation:

  • Fabricate the MEMS gas sensor prototypes using microfabrication techniques and integrate the high entropy alloy sensing material.
  • Conduct comprehensive testing and characterization of the fabricated sensors, including sensitivity, selectivity, response time, stability, and reliability assessments.
  • Perform gas sensing experiments under controlled conditions to evaluate the sensor's performance and compare it with existing gas sensing technologies.

Data Analysis and Interpretation:

  • Analyze and interpret the experimental data collected from the gas sensor tests.
  • Apply statistical analysis and signal processing techniques to extract meaningful insights from the sensor responses.
  • Identify correlations and trends between the sensor's performance and the target gases, concentrations, or environmental factors.

Documentation and Reporting:

  • Document all experimental procedures, results, and observations in a structured and organized manner.
  • Prepare a comprehensive thesis report summarizing the research background, objectives, methodology, findings, and conclusions.
  • Present your work through oral presentations, posters, or conferences, sharing the outcomes and knowledge gained from the research.

You will be integrated with the other teams of IMT and within this project, you will use the infrastructure existent at the Institute of Microstructure Technology (IMT). This is a complete project, offering the possibility to fabricate and test the devices, giving you the opportunity to co-author conference and/or journal publications.

Your Profile

  • Enrolled in a master's program in a relevant field (e.g., Materials Science, Mechanical Engineering, Electrical Engineering, or a related discipline).
  • Strong background in MEMS fabrication, sensor technology, materials science, or a closely related field.
  • Familiarity with gas sensing principles, techniques, and characterization methods.
  • Proficiency in simulation software and programming languages for design and analysis.
  • Hands-on experience with microfabrication processes and characterization tools.
  • Excellent analytical, problem-solving, and communication skills.


Carrasco Sanchez, Raquel

Tel: +49 721 608-42016

Contract duration

6-9 months

Contact person in line-management

For further information, please contact Dr. Bharat Sharma, phone +49 721 608-29312, e-mail: